Engineering Data Collection (EDC).

This module can set a collection plan for the data that needs to be collected in production, and can define parameters, parameter sets, collection points, samples and sample points, etc.

Supports data collection according to Job, Lot, and Wafer, and provides Wafer Sampling rule settings, including TOP+N, BOTTOM+N, etc.

The data can be obtained directly from the measuring device through the interface, or the data can be automatically obtained through the file generated by the measuring device.