Reticle Management (RTL)

This module supports the setting of related attributes of the reticle, such as type, grade, purpose, customer, etc., and can also support integration with E-RACK.

Support the management of the equipment entry and exit of the reticle, and check whether the reticle is used correctly during batch processing. Provide reticle maintenance management, you can set up a maintenance plan according to the usage count and usage time.