FA RMS
FA RMS is a Recipe Management System (RMS) provided by FA Software that fully complies with the SEMI E42 standard.
It can effectively store, manage and control the content of the equipment’s recipe and its recipe body. By combining with FA EAP (or other EAP systems) and myCIM (or other MES systems), automatic recipe selection, automatic loading, and automatic verification can be realized, which can greatly reduce the probability of incorrect recipes used in the production process. This reduces the operator’s work intensity.
FA RMS has been adopted by many customers domestically and abroad, and has been successfully applied.
Access right management includes:- Personnel management- Authority management- The management of mail groups
Access right management includes:
- Personnel management
- Authority management
- The management of mail groups
Equipment management includes:
Equipment management includes:
- Equipment area definition
- Recipe format definition for specific equipment type
- Defines the relationship between the equipment and the equipment type
- Setting up the relationship between equipment recipe and mail
Recipe management includes:
Recipe management includes:
- Download Recipe List from the equipment via EAP
- Save Recipe List to the FA RMS database
Recipe Parse management includes:
Recipe Parse management includes:
- Online Parse Recipe Body content
- Comparing the content of Recipe Body
- The setting of the Recipe Parse rule, which defines how Recipe Parse work
Recipe configuration management includes:
Recipe configuration management includes:
- Users can create draft Recipe Body, upload recipe/programs/sequence bodies, edit recipe parameters (format Recipe) and configure draft recipe body on Recipe
- The user can select recipe/program/sequence ID in the combo box, and the version of recipe/program/sequence will be displayed in the text box
Recipe body template configuration management includes:
Recipe body template configuration management includes:
- Recipe Body template creation
- Provides engineers with configuration capabilities for the content of the Recipe Body template
FA RMS supports three types of Recipe Body comparison: offline comparison, comparison between equipment, and comparison between different versions of Recipe Body.
FA RMS supports three types of Recipe Body comparison: offline comparison, comparison between equipment, and comparison between different versions of Recipe Body.
User can control the version of Recipe Body and activate the temporary version of Recipe Body into a full version so that they can be used.
User can control the version of Recipe Body and activate the temporary version of Recipe Body into a full version so that they can be used.
History management includes:
History management includes:
Record a detailed history of Recipe Body version changes
Record a detailed history of the results of the Recipe Body comparison
FA RMS uses Microsoft .Net framework, which can be deployed on any server running Windows and supports Windows Server 2012 and above.
A separate client is provided for operators to use, and APIs are also provided for other system calls.
Oracle was used as the system's database engine.
The number of FA RMS application servers can increase and shrink at any time depending on the volume of business, and load balancing can be achieved.
+86 021 5080 4093
contact@fa-software.com
#17-01, No.1198 Century Avenue, Shanghai, China
